- Amplified
- silicon die
- 30 SCCM, 200 SCCM, 1000 SCCM, ±1000 SCCM, 0 mbar to 1,25 mbar [0 inH2 0 to 0.5 inH2 0], 0 mbar to 5,0 mbar [0 inH2 0 to 2 inH2 0], 5,0 mbar [2.0 inH2 0]
- Analog
- Power consumption 50 mW max.
- Straight port
- dry gas only
- 12.7 mm x 54.4 mm x 31.5 mm
-25°C to 85°C
